EV-246 Small Resistance Evaporation Coating Machine

Vacuum Chamber: Made of high-quality 1Cr18Ni9Ti stainless steel, argon arc welded, with top-opening lid and front-opening door structure;

Vacuum System: Mechanical pump + molecular pump (imported and domestic options available);

Ultimate Vacuum: Better than 8×10??Pa (after 24 hours of no-load vacuum pumping);

Vacuum Pumping Speed: Atmosphere to 8×10??Pa ≤30min;

Substrate Holder: Removable, size 60×60mm, rotation speed adjustable from 0 to 20r/min, heatable up to 300°C (water cooling function optional);

Evaporation Source and Power Supply: 3 sets of water-cooled copper electrodes, inverter-type evaporation power supply, 2KW power, equipped with anti-contamination partitions between sources;

Film Thickness Monitor: Uses domestic or imported film thickness monitor for online monitoring and control of evaporation rate and film thickness;

Control Method: PLC + touch screen control system, with air leakage self-check and prompt, communication fault detection, enabling one-key vacuum pumping and stopping;

Overall Dimensions: L60cm×W60cm×H96cm integrated electromechanical frame, with one reserved CF35 flange interface.