Product Introduction

PLR3000 Fiber Optic Laser Ruler is based on the principle of laser interferometry, serving as a high-precision, high-sensitivity, and highly efficient advanced position detection device. It offers unique advantages in the field of non-contact high-precision measurement that other methods lack. Compared to traditional steel tape or glass gratings, it features more precise grating pitch and higher resolution. Its heat source isolation design ensures greater stability, along with quick installation and easy alignment. It is specifically designed for ultra-high precision position feedback applications and is widely used in high-tech fields such as microelectronics, micromechanics, micro-optics, modern ultra-precision machining, lithography technology, and aerospace.

The PLR3000 is equipped with a highly stable helium-neon laser source, achieving a frequency stability of up to 0.02 ppm. The laser is guided through polarization-maintaining fiber, allowing users to easily configure the interferometer at any desired measurement position, minimizing Abbe error.

The PLR3000 laser ruler can be configured for single-axis, dual-axis, or triple-axis output based on user requirements, enabling multi-axis or multi-degree-of-freedom measurements. It also offers various interferometer probe configurations, including corner cube interferometers, plane mirror interferometers, differential interferometers, and measurement probes without built-in interferometer groups, catering to diverse and complex application scenarios.

Features

(1) High-resolution digital quadrature signal output with a resolution of 10 nm (expandable externally). 

(2) High measurement accuracy, with linear measurement precision reaching 0.2–0.5 ppm.

(3) High frequency stability, up to 0.02–0.05 ppm.

(4) Large measurement range, with a maximum measuring distance of 4 m (expandable).

(5) The laser emitter and interferometer probe are separated, connected via a 3 m armored fiber optic cable and cable. This allows the main unit to be placed away from the measured equipment, facilitating installation and avoiding the impact of heat dissipation on the measurement path.

(6) Outputs quadrature digital signals or 1 Vpp sine/cosine signals, compatible with various controllers.

(7) Compact size, suitable for installation in confined spaces, minimizing Abbe error. 

(8) Can be used as a laser interferometer for measurement or for closed-loop position feedback control.

(9) Multi-channel output enables simultaneous multi-axis and multi-degree-of-freedom measurements.

(10) Environmental compensation function: an integrated environmental weather station automatically monitors and updates atmospheric parameters, compensating in real-time for the effects of temperature, air pressure, and humidity on the refractive index of air, ensuring measurement accuracy.

Core Advantages

1. High Precision

(1) Resolution of 10 nm (expandable), linear measurement accuracy of 0.2 ppm, and frequency stability of 0.02 ppm, meeting nanoscale measurement requirements.

(2) The environmental weather station provides real-time compensation for the effects of temperature, humidity, and air pressure, ensuring long-term data stability.

2. Flexible Configuration

(1) Supports single-axis, dual-axis, and triple-axis output, enabling multi-degree-of-freedom measurements.

(2) Offers various probe options, including differential interferometers, plane mirror interferometers, and corner cube interferometers, adaptable to complex scenarios.

3. High Stability and Convenience

(1) The laser source and probe are separated, connected by a 3 m armored fiber optic cable, avoiding interference from device heat dissipation and allowing flexible installation.

(2) Compact design, suitable for confined spaces, reducing the risk of Abbe error.

4. Wide Applicability

PLR3000 Fiber Optic Laser Ruler offers a large measuring range of 4 m (expandable) and supports dynamic speeds of up to 2 m/s, covering scenarios from static detection to high-speed motion.

Typical Application Scenarios

Semiconductor Manufacturing: Wafer positioning in lithography machines, feedback control for precision stages.

Aerospace: Engine blade deformation detection, high-precision assembly calibration.

Precision Machining: Multi-axis linkage position feedback in CNC machines, measurement of micromechanical components.

Scientific Research: Stability monitoring of optical platforms, control of ultra-precision experimental equipment.

Service and Support

Customized Solutions: Flexible options for probe configuration, range expansion, and environmental compensation units based on requirements.

Professional Certification: Provides laser calibration certificates issued by the National Institute of Metrology (China) or Shenzhen Institute of Metrology, ensuring data reliability.

Global Service Network: 1-year warranty, with a technical support team available 24/7 for rapid on-site issue resolution.